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A novel mixing surface acoustic wave device for liquid sensing applications

Thu Hang Bui and Morana Bruno and Scholtes Tom and Duc Trinh Chu and Sarro Pasqualina (2016) A novel mixing surface acoustic wave device for liquid sensing applications. In: MEMS: the 2016 IEEE International Conference on Micro Electro Mechanical Systems, 24-28 Januaray 2016, Shanghai, China.

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This paper presents a novel mixing surface acoustic wave (M-SAW) device using multiple Aluminum (Al) interdigital transducer (IDT) layers for liquid sensing applications. The stronger mechanical wave beam generated by the multiple input-IDT layers on the thin film (1 μm) Aluminum Nitride (AlN), consists of different-phase acoustic waves that can travel through a liquid medium. In contrast to the whole signal leaking into liquid medium as in typical SAW devices, the signal obtained at the receiver of the M-SAW device only has a decline in the Rayleigh component. The experimental results show that it is possible to interact with the liquid medium placed on the surface and extract information about the liquid volume based on the phase change. Phase shifts of -16.35°, -11.23°, -4.84°, and -0.86° are obtained for different volumes of demi-water after 10 seconds, 2, 4 and 5 minutes of vaporization, respectively.

Item Type:Conference or Workshop Item (Paper)
Subjects:Electronics and Communications
Electronics and Communications > Electronics and Computer Engineering
Divisions:Faculty of Electronics and Telecommunications (FET)
ID Code:1583
Deposited By: Assoc/Prof Duc Tan Tran
Deposited On:25 May 2016 03:31
Last Modified:25 May 2016 03:33

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