Hannah Robbins and Changqing Liu and Sijung Hu and Thanh Tung Bui and Masahiro Aoyagi (2016) Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH). In: 2016 6th Electronic System-Integration Technology Conference (ESTC).
Full text not available from this repository.
Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370Âµm etch depth, to house a micro-capillary.
|Item Type:||Conference or Workshop Item (Lecture)|
|Uncontrolled Keywords:||Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon|
|Subjects:||Electronics and Communications|
|Divisions:||Faculty of Electronics and Telecommunications (FET)|
|Deposited By:||Bùi Thanh Tùng|
|Deposited On:||29 Dec 2016 02:48|
|Last Modified:||29 Dec 2016 02:48|
Repository Staff Only: item control page