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Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH)

Hannah Robbins and Changqing Liu and Sijung Hu and Thanh Tung Bui and Masahiro Aoyagi (2016) Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH). In: 2016 6th Electronic System-Integration Technology Conference (ESTC).

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Abstract

Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370µm etch depth, to house a micro-capillary.

Item Type:Conference or Workshop Item (Lecture)
Uncontrolled Keywords:Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon
Subjects:Electronics and Communications
Divisions:Faculty of Electronics and Telecommunications (FET)
ID Code:2319
Deposited By: Bùi Thanh Tùng
Deposited On:29 Dec 2016 02:48
Last Modified:29 Dec 2016 02:48

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