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Fri, 29 Mar 2024 09:27:48 +0700Fri, 29 Mar 2024 09:27:48 +0700en Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators
https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2364/
Le, Vu Ha and Gouiffes, Michele and Parrain, Fabien and Bosseboeuf, Alain and Zavidovique, Bertrand (2007) Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators. In: SPIE Optical Engineering + Applications, 2007, San Diego, CA, USA.