VNU-UET Repository: No conditions. Results ordered -Date Deposited. 2024-03-28T10:06:17ZEPrintshttp://eprints.uet.vnu.edu.vn/images/sitelogo.pnghttps://eprints.uet.vnu.edu.vn/eprints/2019-06-20T22:40:12Z2019-06-24T06:45:13Zhttp://eprints.uet.vnu.edu.vn/eprints/id/eprint/3516This item is in the repository with the URL: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/35162019-06-20T22:40:12ZResonator for magnetic sensor applications based on the magnetoelectric thin film integrated on SiMagnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials, which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic field range less than 0.2 T, the sensor’s sensitivity as high as 250 Hz/T and 487 Hz/T were achieved in vacuum environments of … and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of micro-ME-sensors for sensing magnetic field.Thi Ngoc NguyenG. AgnusS. MatzenT. MaroutianThi Huong Giang Dogiangdth@vnu.edu.vnP. Lecoeur2016-05-27T03:13:37Z2016-05-27T03:14:39Zhttp://eprints.uet.vnu.edu.vn/eprints/id/eprint/1757This item is in the repository with the URL: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/17572016-05-27T03:13:37ZFabrication and characterization of PZT string based MEMS devicesString based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/FeNi/Pd/PZT/LSMO/STO/Si. The displacement of strings is investigated in both static and dynamic mode. The static response exhibits a bending displacement as large as 1.2 μm, whereas the dynamic response shows a strong resonance with a high quality factor of 40 depending on the resonant mode at atmospheric pressure. These findings are comparable with those observed in large dimension membrane and cantilever based MEMS devices, which exhibit high potentials in variety of sensor and resonant actuator applications.Thi Huong Giang Dogiangdth@vnu.edu.vnHuu Duc Nguyenducnh@vnu.edu.vnG. AgnusT. MaroutianPhilippe Lecoeur