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Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool

Tran, Duc Tan and Nguyen, Thang Long and Nguyen, Phu Thuy (2005) Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool. Tạp chí Phát triển Khoa học - Công nghệ, 8 (11). pp. 39-46. ISSN 1859-0128

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Abstract

In this paper, we focused on modeling the structure of the capacitive accelerometer by using Sugar in Matlab environment, Sugar is such a powerful and flexible language that MEMS designer can get the equivalent results to classical methods (FEM, BEM). The accelerometers having the vertical structure with four diagonal spring beams were designed and simulated. Inother way, we built a closed-loop system which can be applied for this structure. The system used sigma-delta modulation method because of its noise shaping properties and its direct digital output signal.

Item Type: Article
Subjects: Electronics and Communications
Electronics and Communications > Electronics and Computer Engineering
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Assoc/Prof Duc Tan Tran
Date Deposited: 03 Dec 2015 06:46
Last Modified: 09 Aug 2016 03:16
URI: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/1403

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