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Micro/nano-Mechanical Sensors and Actuators based on SOI-MEMS Technology

Dao, Dzung Viet and Nakamura, Koichi and Tung, Bui Thanh and Sugiyama, Susumu (2010) Micro/nano-Mechanical Sensors and Actuators based on SOI-MEMS Technology. Advances in Natural Sciences: Nanoscience and Nanotechnology, 1 (1). 013001.

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MEMS (micro-electro-mechanical systems) technology has undergone almost 40 years of development, with significant technology advancement and successful commercialization of single-functional MEMS devices, such as pressure sensors, accelerometers, gyroscopes, microphones, micro-mirrors, etc. In this context of MEMS technology, this paper introduces our studies and developments of novel micro/nano-mechanical sensors and actuators based on silicon- on-insulator (SOI)-MEMS technology, as well as fundamental research on piezoresistive effects in single-crystal silicon nanowires (SiNWs). In the first area, novel mechanical sensors, such as 6-DOF micro-force moment sensors, multi-axis inertial sensors and micro-electrostatic actuators developed with SOI-MEMS technology will be presented. In the second area, we have combined atomic-level simulation and experimental evaluation methods to explain the giant piezoresistive effect in single crystalline SiNWs along different crystallographic orientations. This discovery is significant for developing more highly sensitive and miniaturized mechanical sensors in the near future.

Item Type: Article
Subjects: Information Technology (IT)
ISI-indexed journals
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Prof. Xuan-Tu Tran
Date Deposited: 31 Dec 2013 10:11
Last Modified: 31 Dec 2013 10:11

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