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Integrated CNTs Thin Film for MEMS Mechanical Sensors

Dau, Van Thanh and Yamada, Takeo and Dao, Dzung Viet and Tung, Bui Thanh and Hata, Kenji and Sugiyama, Susumu (2010) Integrated CNTs Thin Film for MEMS Mechanical Sensors. Microelectronics Journal, 41 (12). pp. 860-864. ISSN 0026-2692

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Item Type: Article
Uncontrolled Keywords: MEMS process
Subjects: Electronics and Communications
Electronics and Communications > Electronics and Computer Engineering
ISI-indexed journals
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Prof. Xuan-Tu Tran
Date Deposited: 25 Dec 2013 08:18
Last Modified: 25 Dec 2013 08:18
URI: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/212

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