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Mechanism of TCO thin film removal process using near-infrared ns pulse laser: Plasma shielding effect on irradiation direction

Kim, Byunggi and Iida, Ryoichi and Doan, Hong Duc and Fushinobu, Kazuyoshi (2016) Mechanism of TCO thin film removal process using near-infrared ns pulse laser: Plasma shielding effect on irradiation direction. International Journal of Heat and Mass Transfer, 102 . pp. 77-85. ISSN 0017-9310

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Item Type: Article
Subjects: Engineering Mechanics
ISI-indexed journals
Divisions: Faculty of Engineering Mechanics and Automation (FEMA)
Depositing User: Dr Hong Duc Doan
Date Deposited: 31 Dec 2016 14:09
Last Modified: 31 Dec 2016 14:09
URI: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/2216

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