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Integrated inductor fabrication by monolithic approach

Nguyen, Thi Yen Mai (2018) Integrated inductor fabrication by monolithic approach. Technical Report. University of Engineering and Technology, Hanoi.

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This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.

Item Type: Technical Report (Technical Report)
Subjects: Engineering Physics
Divisions: Faculty of Engineering Physics and Nanotechnology (FEPN)
Depositing User: Nguy�n Th
Date Deposited: 06 Jul 2018 02:56
Last Modified: 06 Jul 2018 02:56

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