@article{SisLab1284, volume = {53}, title = {120 nm Channel Length Ferroelectric Gate Thin-Film Transistor by Nano-imprinting Lithography}, author = {K. Nagahara and Nguyen Quoc Trinh Bui and E. Tokumitsu and S. Inoue and T. Shimoda}, year = {2014}, pages = {02BC14--1}, journal = {Japanese Journal of Applied Physics, 2014}, url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/1284/} }