Nagahara, K. and Bui, Nguyen Quoc Trinh and Tokumitsu, E. and Inoue, S. and Shimoda, T.
(2014)
120 nm Channel Length Ferroelectric Gate Thin-Film Transistor by Nano-imprinting Lithography.
Japanese Journal of Applied Physics, 2014, 53
.
02BC14-1.
ISSN 0021-4922