?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Tran%2C+Duc+Tan&rft.aulast=Tran&rft.aufirst=Duc+Tan&rft.date=2008&rft.title=Optimum+Design+Considerations+for+a+3-DOF+Micro+Accelerometer+using+Nanoscale+Piezoresistors&rft.genre=proceeding