TY - CONF ID - SisLab1389 UR - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/1389/ A1 - Tran, Duc Tan A1 - Dao, Viet Dzung A1 - Bui, Thanh Tung A1 - Nguyen, Thang Long A1 - Nguyen, Phu Thuy A1 - Susumu, Sugiyama Y1 - 2008/// TI - Optimum Design Considerations for a 3-DOF Micro Accelerometer using Nanoscale Piezoresistors SP - 770 AV - public EP - 773 T2 - 2008: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ER -