%A Duc Tan Tran %A Viet Dzung Dao %A Thanh Tung Bui %A Thang Long Nguyen %A Phu Thuy Nguyen %A Sugiyama Susumu %T Optimum Design Considerations for a 3-DOF Micro Accelerometer using Nanoscale Piezoresistors %D 2008 %P 770-773 %L SisLab1389