<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool"^^ . "In this paper, we focused on modeling the structure of the capacitive accelerometer by using Sugar in Matlab environment, Sugar is such a powerful and flexible language that MEMS designer can get the equivalent results to classical methods (FEM, BEM). The accelerometers having the vertical structure with four diagonal spring beams were designed and simulated. Inother way, we built a closed-loop system which can be applied for this structure. The system used sigma-delta modulation method because of its noise shaping properties and its direct digital output signal."^^ . "2005" . "8" . "11" . . "Tạp chí Phát triển Khoa học - Công nghệ"^^ . . . "18590128" . . . . . . . . . . . . . "Thang Long"^^ . "Nguyen"^^ . "Thang Long Nguyen"^^ . . "Duc Tan"^^ . "Tran"^^ . "Duc Tan Tran"^^ . . "Phu Thuy"^^ . "Nguyen"^^ . "Phu Thuy Nguyen"^^ . . . . . "HTML Summary of #1403 \n\nMechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool\n\n" . "text/html" . . . "Electronics and Communications"@en . . . "Electronics and Computer Engineering"@en . .