%A Duc Tan Tran
%A Thang Long Nguyen
%A Phu Thuy Nguyen
%J Tạp chí Phát triển Khoa học - Công nghệ
%T Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool
%X In this paper, we focused on modeling the structure of the capacitive accelerometer by using Sugar in Matlab environment, Sugar is such a powerful and flexible language that MEMS designer can get the equivalent results to classical methods (FEM, BEM). The accelerometers having the vertical structure with four diagonal spring beams were designed and simulated. Inother way, we built a closed-loop system which can be applied for this structure. The system used sigma-delta modulation method because of its noise shaping properties and its direct digital output signal.
%N 11
%P 39-46
%V 8
%D 2005
%L SisLab1403