eprintid: 1403
rev_number: 9
eprint_status: archive
userid: 12
dir: disk0/00/00/14/03
datestamp: 2015-12-03 06:46:59
lastmod: 2016-08-09 03:16:28
status_changed: 2015-12-03 06:46:59
type: article
metadata_visibility: show
creators_name: Tran, Duc Tan
creators_name: Nguyen, Thang Long
creators_name: Nguyen, Phu Thuy
creators_id: tantd@vnu.edu.vn
creators_id: longnt@vnu.edu.vn
title: Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
divisions: fac_fet
abstract: In this paper, we focused on modeling the structure of the capacitive accelerometer by using Sugar in Matlab environment, Sugar is such a powerful and flexible language that MEMS designer can get the equivalent results to classical methods (FEM, BEM). The accelerometers having the vertical structure with four diagonal spring beams were designed and simulated. Inother way, we built a closed-loop system which can be applied for this structure. The system used sigma-delta modulation method because of its noise shaping properties and its direct digital output signal.
date: 2005
date_type: published
full_text_status: none
publication: Tạp chí Phát triển Khoa học - Công nghệ
volume: 8
number: 11
pagerange: 39-46
refereed: TRUE
issn: 1859-0128
citation:   Tran, Duc Tan and Nguyen, Thang Long and Nguyen, Phu Thuy  (2005) Mechanical and Electronics Design of Capacitive Accelerometers Using Sugar Tool.  Tạp chí Phát triển Khoa học - Công nghệ, 8  (11).   pp. 39-46.  ISSN 1859-0128