%A Dinh Tu Bui %A T.Q. Hung %A N.T. Thanh %A T.M. Danh %A Huu Duc Nguyen %A CheolGi Kim %J Journal of Applied Physics %T Planar Hall Bead Array Counter Microchip with NiFe/IrMn Bilayers %X The planar Hall effect (PHE) magnetic bead array countermicrochip integrating 24 of single sensors based on a simple NiFe/IrMn bilayer structure with a patterned size of 3×3 μm2 has been fabricated and characterized. Single PHE sensors exhibit a sensitivity of about 2.5 mΩ/Oe. It was well applied for single Dynabeads® M-280 detection, where one bead can induce a signal change, ΔV∼2.2 mV, under the applied magnetic field of 20 Oe and a sensing current of 2 mA. This type of microchip is promising for quickly detecting and identifying multiple biological agents in the environment. %N 7 %K Hall effect;Hall effect devices;biological techniques;ferromagnetic materials;interface magnetism;iridium alloys;iron alloys;magnetic anisotropy;magnetic sensors;magnetoresistance;manganese alloys;nickel alloys;0707Df;8575Nn %P 074701-074701 %V 104 %D 2008 %L SisLab144