Bui, Thanh Tung and Van, Dan and Dinh, Xuan Thien and Tibor, Terebessy and Phan, Thanh Hoa
(2016)
Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation.
In: IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 24-28 January 2016, China.