TY  - CONF
ID  - SisLab1581
UR  - http://mems2016.org
A1  - Bui, Thanh Tung
A1  - Van, Dan
A1  - Dinh, Xuan Thien
A1  - Tibor, Terebessy
A1  - Phan, Thanh Hoa
Y1  - 2016/01/01/
N2  - In this paper we present, for the first time, a reliable cost-effective absolute pressure sensor based on a novel bipolar corona system, which monitors pressure by producing both polarities of corona discharge simultaneously. The unique setup increases sensitivity and stability of the sensor. Systematical design study, numerical simulation and experiment of five prototypes acquired consistent results. With sub-microampere operating current, the sensors have temperature-independent sensitivity and good repeatability.
TI  - Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation
SP  - 1
M2  - China
AV  - public
EP  - 5
T2  - IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
ER  -