eprintid: 1581
rev_number: 23
eprint_status: archive
userid: 12
dir: disk0/00/00/15/81
datestamp: 2016-05-31 02:26:22
lastmod: 2016-05-31 02:26:22
status_changed: 2016-05-31 02:26:22
type: conference_item
metadata_visibility: show
creators_name: Bui, Thanh Tung
creators_name: Van, Dan
creators_name: Dinh, Xuan Thien
creators_name: Tibor, Terebessy
creators_name: Phan, Thanh Hoa
creators_id: tungbt@vnu.edu.vn
creators_id: v.dan@gmail.com
creators_id: txuan.dinh@gmail.com
creators_id: t.terebessy@gmail.com
creators_id: p.hoa@gmail.com
title: Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation
ispublished: pub
subjects: ElectronicsandComputerEngineering
divisions: fac_fet
abstract: In this paper we present, for the first time, a reliable cost-effective absolute pressure sensor based on a novel bipolar corona system, which monitors pressure by producing both polarities of corona discharge simultaneously. The unique setup increases sensitivity and stability of the sensor. Systematical design study, numerical simulation and experiment of five prototypes acquired consistent results. With sub-microampere operating current, the sensors have temperature-independent sensitivity and good repeatability.
date: 2016-01-01
date_type: published
official_url: http://mems2016.org
full_text_status: public
pres_type: paper
pagerange: 1-5
event_title: IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
event_location: China
event_dates: 24-28 January 2016
event_type: conference
refereed: TRUE
related_url_url: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154
citation:   Bui, Thanh Tung and Van, Dan and Dinh, Xuan Thien and Tibor, Terebessy and Phan, Thanh Hoa  (2016) Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation.  In: IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 24-28 January 2016, China.     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/1581/3/Abstract%20%282%29.pdf