%0 Journal Article
%@ 0924-4247
%A Dau, Thanh Van
%A Bui, Thanh Tung
%A Dinh, Xuan Thien
%A Terebessy, Tibor
%D 2016
%F SisLab:1582
%I Elsevier
%J Sensors and Actuators A Physical
%P 81-90
%T Pressure sensor based on bipolar discharge corona configuration
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/1582/
%X We present a pressure sensing unit based on a unique corona discharge setup using symmetrical electrode arrangement with simultaneous positive and negative corona generation. The device generates stable corona discharge and enables reliable air pressure measurement in the range of 80-105 kPa, tested with five prototypes. The current-voltage characteristics of bipolar discharge system is analyzed in general form and three governing parameters, namely electrode geometry, electrode distance and discharge current, are studied in relation with absolute pressure. The sensors are driven with constant discharge current as low as 1 μA. The measured sensitivity is in good agreement with theoretical prediction and the sensor stability has been confirmed with 20-h continuous test without sensitivity deterioration. The sensitivity does not depend on the tested temperature range and its variation between devices is small, approximately ±3.0%. The advantage of the proposed system compared with similar corona-based constructions is its stable operation at low current with low power consumption and minimum electrode deterioration, which provides a cost effective and reliable solution