TY  - CONF
ID  - SisLab1583
UR  - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154
A1  - Bui, Thu Hang
A1  - Bruno, Morana
A1  - Tom, Scholtes
A1  - Chu, Duc Trinh
A1  - Pasqualina, Sarro
Y1  - 2016/01/01/
N2  - This paper presents a novel mixing surface acoustic wave (M-SAW) device using multiple Aluminum (Al) interdigital transducer (IDT) layers for liquid sensing applications. The stronger mechanical wave beam generated by the multiple input-IDT layers on the thin film (1 ?m) Aluminum Nitride (AlN), consists of different-phase acoustic waves that can travel through a liquid medium. In contrast to the whole signal leaking into liquid medium as in typical SAW devices, the signal obtained at the receiver of the M-SAW device only has a decline in the Rayleigh component. The experimental results show that it is possible to interact with the liquid medium placed on the surface and extract information about the liquid volume based on the phase change. Phase shifts of -16.35°, -11.23°, -4.84°, and -0.86° are obtained for different volumes of demi-water after 10 seconds, 2, 4 and 5 minutes of vaporization, respectively.
TI  - A novel mixing surface acoustic wave device for liquid sensing applications
SP  - 475
M2  - Shanghai, China
AV  - none
EP  - 478
T2  - MEMS: the 2016 IEEE International Conference on Micro Electro Mechanical Systems
ER  -