eprintid: 1583
rev_number: 19
eprint_status: archive
userid: 12
dir: disk0/00/00/15/83
datestamp: 2016-05-25 03:31:02
lastmod: 2016-05-25 03:33:23
status_changed: 2016-05-25 03:31:02
type: conference_item
metadata_visibility: show
creators_name: Bui, Thu Hang
creators_name: Bruno, Morana
creators_name: Tom, Scholtes
creators_name: Chu, Duc Trinh
creators_name: Pasqualina, Sarro
creators_id: hangbt@vnu.edu.vn
creators_id: b.morana@gmail.com
creators_id: t.scholtes@gmail.com
creators_id: trinhcd@vnu.edu.vn
creators_id: p.sarro@gmail.com
title: A novel mixing surface acoustic wave device for liquid sensing applications
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
divisions: fac_fet
abstract: This paper presents a novel mixing surface acoustic wave (M-SAW) device using multiple Aluminum (Al) interdigital transducer (IDT) layers for liquid sensing applications. The stronger mechanical wave beam generated by the multiple input-IDT layers on the thin film (1 μm) Aluminum Nitride (AlN), consists of different-phase acoustic waves that can travel through a liquid medium. In contrast to the whole signal leaking into liquid medium as in typical SAW devices, the signal obtained at the receiver of the M-SAW device only has a decline in the Rayleigh component. The experimental results show that it is possible to interact with the liquid medium placed on the surface and extract information about the liquid volume based on the phase change. Phase shifts of -16.35°, -11.23°, -4.84°, and -0.86° are obtained for different volumes of demi-water after 10 seconds, 2, 4 and 5 minutes of vaporization, respectively.
date: 2016-01-01
date_type: published
official_url: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154
full_text_status: none
pres_type: paper
pagerange: 475-478
event_title: MEMS: the 2016 IEEE International Conference on Micro Electro Mechanical Systems
event_location: Shanghai, China
event_dates: 24-28 Januaray 2016
event_type: conference
refereed: TRUE
related_url_url: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154
citation:   Bui, Thu Hang and Bruno, Morana and Tom, Scholtes and Chu, Duc Trinh and Pasqualina, Sarro  (2016) A novel mixing surface acoustic wave device for liquid sensing applications.  In: MEMS: the 2016 IEEE International Conference on Micro Electro Mechanical Systems, 24-28 Januaray 2016, Shanghai, China.