eprintid: 1627
rev_number: 8
eprint_status: archive
userid: 21
dir: disk0/00/00/16/27
datestamp: 2016-05-30 05:23:34
lastmod: 2016-05-30 05:23:34
status_changed: 2016-05-30 05:23:34
type: article
metadata_visibility: show
creators_name: Phan, Huu Phu
creators_name: Nguyen, Minh Ngoc
creators_name: Nguyen, Ngoc Viet
creators_name: Chu, Duc Trinh
creators_id: trinhcd@vnu.edu.vn
title: Analytical modeling of a silicon-polymer electrothermal microactuator
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
subjects: isi
divisions: fac_fet
abstract: This paper illustrates both thermal and mechanical analysis methods for displacement and contact force calculating of a novel sensing silicon-polymer microgripper when heat sources are applied by an electric current via its actuators. Thermal analysis is used to obtain temperature profile by figuring out a heat conductions and convections model. Temperature profile is then applied into the mechanical structure of the gripper’s actuators to form the final equation of displacement and contact force of the jaws. Finally, the comparison among the calculation, simulation and actual measurement concludes that materialization methods are appropriate. Achieving the final equation of gripper’s jaws displacement and contact force is a major step to optimize or reform this novel structure for different sizes to meet specific applications.
date: 2015
date_type: published
publisher: Springer Berlin Heidelberg
full_text_status: none
publication: Microsystem Technologies Journal
refereed: TRUE
issn: 0946-7076
citation:   Phan, Huu Phu and Nguyen, Minh Ngoc and Nguyen, Ngoc Viet and Chu, Duc Trinh  (2015) Analytical modeling of a silicon-polymer electrothermal microactuator.  Microsystem Technologies Journal .    ISSN 0946-7076