eprintid: 1757
rev_number: 10
eprint_status: archive
userid: 16
dir: disk0/00/00/17/57
datestamp: 2016-05-27 03:13:37
lastmod: 2016-05-27 03:14:39
status_changed: 2016-05-27 03:13:37
type: article
metadata_visibility: show
creators_name: Do, Thi Huong Giang
creators_name: Nguyen, Huu Duc
creators_name: Agnus, G.
creators_name: Maroutian, T.
creators_name: Lecoeur, Philippe
creators_id: giangdth@vnu.edu.vn
creators_id: ducnh@vnu.edu.vn
title: Fabrication and characterization of PZT string based MEMS devices
ispublished: inpress
subjects: Phys
divisions: fac_physic
keywords: Piezoelectric; clamped-clamped beam; string based MEMS; C-V characteristics; optical interferometer profiler; quality factor
abstract: String based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/FeNi/Pd/PZT/LSMO/STO/Si. The displacement of strings is investigated in both static and dynamic mode. The static response exhibits a bending displacement as large as 1.2 μm, whereas the dynamic response shows a strong resonance with a high quality factor of 40 depending on the resonant mode at atmospheric pressure. These findings are comparable with those observed in large dimension membrane and cantilever based MEMS devices, which exhibit high potentials in variety of sensor and resonant actuator applications.
date: 2016-01
date_type: published
publisher: Elsevier B.V
official_url: http://www.journals.elsevier.com/journal-of-science-advanced-materials-and-devices/
contact_email: giangdth@vnu.edu.vn
full_text_status: none
publication: Journal of Science: Advanced Materials and Devices
refereed: TRUE
issn: 2468-2179
funders: Program for Space Technology of Vietnam
funders: Vietnam National University, Hanoi
projects: Research Project VT/CN-03/13-15
projects: Research Project QG 15.28
citation:   Do, Thi Huong Giang and Nguyen, Huu Duc and Agnus, G. and Maroutian, T. and Lecoeur, Philippe  (2016) Fabrication and characterization of PZT string based MEMS devices.  Journal of Science: Advanced Materials and Devices .    ISSN 2468-2179    (In Press)