?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Dao%2C+Dzung+Viet&rft.aulast=Dao&rft.aufirst=Dzung+Viet&rft.issue=1&rft.volume=1&rft.date=2010&rft.atitle=Micro%2Fnano-Mechanical+Sensors+and+Actuators+based+on+SOI-MEMS+Technology&rft.title=Advances+in+Natural+Sciences%3A+Nanoscience+and+Nanotechnology&rft.pages=013001&rft.genre=article