eprintid: 209
rev_number: 6
eprint_status: archive
userid: 4
dir: disk0/00/00/02/09
datestamp: 2013-12-31 10:11:25
lastmod: 2013-12-31 10:11:25
status_changed: 2013-12-31 10:11:25
type: article
metadata_visibility: show
creators_name: Dao, Dzung Viet
creators_name: Nakamura, Koichi
creators_name: Tung, Bui Thanh
creators_name: Sugiyama, Susumu
creators_id: tungbt@vnu.edu.vn
title: Micro/nano-Mechanical Sensors and Actuators based on SOI-MEMS Technology
ispublished: pub
subjects: IT
subjects: isi
divisions: fac_fet
abstract: MEMS (micro-electro-mechanical systems) technology has undergone almost 40 years of development, with significant technology advancement and successful commercialization of single-functional MEMS devices, such as pressure sensors, accelerometers, gyroscopes, microphones, micro-mirrors, etc. In this context of MEMS technology, this paper introduces our studies and developments of novel micro/nano-mechanical sensors and actuators based on silicon- on-insulator (SOI)-MEMS technology, as well as fundamental research on piezoresistive effects in single-crystal silicon nanowires (SiNWs). In the first area, novel mechanical sensors, such as 6-DOF micro-force moment sensors, multi-axis inertial sensors and micro-electrostatic actuators developed with SOI-MEMS technology will be presented. In the second area, we have combined atomic-level simulation and experimental evaluation methods to explain the giant piezoresistive effect in single crystalline SiNWs along different crystallographic orientations. This discovery is significant for developing more highly sensitive and miniaturized mechanical sensors in the near future.
date: 2010
date_type: published
official_url: http://stacks.iop.org/2043-6262/1/i=1/a=013001
full_text_status: none
publication: Advances in Natural Sciences: Nanoscience and Nanotechnology
volume: 1
number: 1
pagerange: 013001
refereed: TRUE
citation:   Dao, Dzung Viet and Nakamura, Koichi and Tung, Bui Thanh and Sugiyama, Susumu  (2010) Micro/nano-Mechanical Sensors and Actuators based on SOI-MEMS Technology.  Advances in Natural Sciences: Nanoscience and Nanotechnology, 1  (1).   013001.