@article{SisLab212,
          volume = {41},
          number = {12},
          author = {Van Thanh Dau and Takeo Yamada and Dzung Viet Dao and Bui Thanh Tung and Kenji Hata and Susumu Sugiyama},
           title = {Integrated CNTs Thin Film for MEMS Mechanical Sensors},
       publisher = {Elsevier},
         journal = {Microelectronics Journal},
           pages = {860--864},
            year = {2010},
        keywords = {MEMS process},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/212/}
}