?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Dau%2C+Van+Thanh&rft.aulast=Dau&rft.aufirst=Van+Thanh&rft.issue=12&rft.volume=41&rft.date=2010&rft.issn=0026-2692&rft.atitle=Integrated+CNTs+Thin+Film+for+MEMS+Mechanical+Sensors&rft.title=Microelectronics+Journal&rft.pages=860-864&rft.genre=article