relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/212/
title: Integrated CNTs Thin Film for MEMS Mechanical Sensors
creator: Dau, Van Thanh
creator: Yamada, Takeo
creator: Dao, Dzung Viet
creator: Tung, Bui Thanh
creator: Hata, Kenji
creator: Sugiyama, Susumu
subject: Electronics and Communications
subject: Electronics and Computer Engineering
subject: ISI-indexed journals
publisher: Elsevier
date: 2010
type: Article
type: PeerReviewed
identifier:   Dau, Van Thanh and Yamada, Takeo and Dao, Dzung Viet and Tung, Bui Thanh and Hata, Kenji and Sugiyama, Susumu  (2010) Integrated CNTs Thin Film for MEMS Mechanical Sensors.  Microelectronics Journal, 41  (12).   pp. 860-864.  ISSN 0026-2692     
relation: http://www.sciencedirect.com/science/article/pii/S0026269210001333