%0 Journal Article
%@ 0026-2692
%A Dau, Van Thanh
%A Yamada, Takeo
%A Dao, Dzung Viet
%A Tung, Bui Thanh
%A Hata, Kenji
%A Sugiyama, Susumu
%D 2010
%F SisLab:212
%I Elsevier
%J Microelectronics Journal
%K MEMS process
%N 12
%P 860-864
%T Integrated CNTs Thin Film for MEMS Mechanical Sensors
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/212/
%V 41