<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Integrated CNTs Thin Film for MEMS Mechanical Sensors"^^ . "2010" . "41" . "12" . . "Elsevier"^^ . . . "Microelectronics Journal"^^ . . . "00262692" . . . . . . . . . . . . . . . . . . . . . . "Kenji"^^ . "Hata"^^ . "Kenji Hata"^^ . . "Takeo"^^ . "Yamada"^^ . "Takeo Yamada"^^ . . "Van Thanh"^^ . "Dau"^^ . "Van Thanh Dau"^^ . . "Dzung Viet"^^ . "Dao"^^ . "Dzung Viet Dao"^^ . . "Bui Thanh"^^ . "Tung"^^ . "Bui Thanh Tung"^^ . . "Susumu"^^ . "Sugiyama"^^ . "Susumu Sugiyama"^^ . . . . . "HTML Summary of #212 \n\nIntegrated CNTs Thin Film for MEMS Mechanical Sensors\n\n" . "text/html" . . . "Electronics and Communications"@en . . . "Electronics and Computer Engineering"@en . . . "ISI-indexed journals"@en . .