TY  - JOUR
ID  - SisLab212
UR  - http://www.sciencedirect.com/science/article/pii/S0026269210001333
IS  - 12
A1  - Dau, Van Thanh
A1  - Yamada, Takeo
A1  - Dao, Dzung Viet
A1  - Tung, Bui Thanh
A1  - Hata, Kenji
A1  - Sugiyama, Susumu
Y1  - 2010///
PB  - Elsevier
JF  - Microelectronics Journal
VL  - 41
KW  - MEMS process
SN  - 0026-2692
TI  - Integrated CNTs Thin Film for MEMS Mechanical Sensors
SP  - 860
AV  - none
EP  - 864
ER  -