%A Van Thanh Dau
%A Takeo Yamada
%A Dzung Viet Dao
%A Bui Thanh Tung
%A Kenji Hata
%A Susumu Sugiyama
%J Microelectronics Journal
%T Integrated CNTs Thin Film for MEMS Mechanical Sensors
%N 12
%K MEMS process
%P 860-864
%V 41
%D 2010
%I Elsevier
%L SisLab212