eprintid: 212
rev_number: 7
eprint_status: archive
userid: 4
dir: disk0/00/00/02/12
datestamp: 2013-12-25 08:18:01
lastmod: 2013-12-25 08:18:01
status_changed: 2013-12-25 08:18:01
type: article
metadata_visibility: show
creators_name: Dau, Van Thanh
creators_name: Yamada, Takeo
creators_name: Dao, Dzung Viet
creators_name: Tung, Bui Thanh
creators_name: Hata, Kenji
creators_name: Sugiyama, Susumu
creators_id: tungbt@vnu.edu.vn
title: Integrated CNTs Thin Film for MEMS Mechanical Sensors
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
subjects: isi
divisions: fac_fet
keywords: MEMS process
date: 2010
date_type: published
publisher: Elsevier
official_url: http://www.sciencedirect.com/science/article/pii/S0026269210001333
full_text_status: none
publication: Microelectronics Journal
volume: 41
number: 12
pagerange: 860-864
refereed: TRUE
issn: 0026-2692
citation:   Dau, Van Thanh and Yamada, Takeo and Dao, Dzung Viet and Tung, Bui Thanh and Hata, Kenji and Sugiyama, Susumu  (2010) Integrated CNTs Thin Film for MEMS Mechanical Sensors.  Microelectronics Journal, 41  (12).   pp. 860-864.  ISSN 0026-2692