@article{SisLab221,
          volume = {17},
          number = {6},
           title = {Electrothermal Microgripper With Large Jaw Displacement and Integrated Force Sensors},
          author = {Duc-Trinh Chu and Gih-Keong Lau and J. F. Creemer and P. M. Sarro},
            year = {2008},
           pages = {1546--1555},
         journal = {IEEEJMEMS},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/221/},
        abstract = {The novel design of a sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force-sensing cantilever beams is presented. The actuator consists of a silicon comb structure with an aluminum heater on top and filled polymer in between the comb fingers. The sensor consists of a silicon cantilever with sensing piezoresistors on top. A microgripper jaw displacement up to 32 mum at a 4.5-V applied voltage is measured. The maximum average temperature change is 176 {$\backslash$}textsuperscriptdegC. The output voltage of the piezoresistive sensing cantilever is up to 49 mV at the maximum jaw displacement. The measured force sensitivity is up to 1.7 V/N with a corresponding displacement sensitivity of 1.5 kV/m. Minimum detectable displacement of 1 nm and minimum detectable force of 770 nN are estimated. This sensing microgripper can potentially be used in automatic manipulation systems in microassembly and microrobotics. 2008-0064.}
}