@inproceedings{SisLab2319,
       booktitle = {2016 6th Electronic System-Integration Technology Conference (ESTC)},
           month = {September},
           title = {Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH)},
          author = {Hannah Robbins and Changqing Liu and Sijung Hu and Thanh Tung Bui and Masahiro Aoyagi},
            year = {2016},
           pages = {1--6},
        keywords = {Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2319/},
        abstract = {Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370{\^A}?m etch depth, to house a micro-capillary.}
}