%0 Conference Paper
%A Robbins, Hannah
%A Liu, Changqing
%A Hu, Sijung
%A Bui, Thanh Tung
%A Aoyagi, Masahiro
%B 2016 6th Electronic System-Integration Technology Conference (ESTC)
%D 2016
%F SisLab:2319
%K Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon
%P 1-6
%T Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH)
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2319/
%X Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370µm etch depth, to house a micro-capillary.