Robbins, Hannah and Liu, Changqing and Hu, Sijung and Bui, Thanh Tung and Aoyagi, Masahiro
(2016)
Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH).
In: 2016 6th Electronic System-Integration Technology Conference (ESTC).