Robbins, Hannah and Liu, Changqing and Hu, Sijung and Bui, Thanh Tung and Aoyagi, Masahiro (2016) Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH). In: 2016 6th Electronic System-Integration Technology Conference (ESTC).