TY  - CONF
ID  - SisLab2319
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2319/
A1  - Robbins, Hannah
A1  - Liu, Changqing
A1  - Hu, Sijung
A1  - Bui, Thanh Tung
A1  - Aoyagi, Masahiro
Y1  - 2016/09//
N2  - Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370µm etch depth, to house a micro-capillary.
KW  - Etching
KW  -  Fluorescence
KW  -  Lighting
KW  -  microfluidics
KW  -  Optical device fabrication
KW  -  silicon
TI  - Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH)
SP  - 1
AV  - none
EP  - 6
T2  - 2016 6th Electronic System-Integration Technology Conference (ESTC)
ER  -