eprintid: 2319
rev_number: 10
eprint_status: archive
userid: 270
dir: disk0/00/00/23/19
datestamp: 2016-12-29 02:48:51
lastmod: 2016-12-29 02:48:51
status_changed: 2016-12-29 02:48:51
type: conference_item
metadata_visibility: show
creators_name: Robbins, Hannah
creators_name: Liu, Changqing
creators_name: Hu, Sijung
creators_name: Bui, Thanh Tung
creators_name: Aoyagi, Masahiro
creators_id: h.r.robbins@outlook.com
creators_id: c.liu@lboro.ac.uk
creators_id: s.hu@lboro.ac.uk
creators_id: tungbt@vnu.edu.vn
creators_id: m-aoyagi@aist.go.jp
title: Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH)
ispublished: pub
subjects: ECE
divisions: fac_fet
keywords: Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon
abstract: Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370µm etch depth, to house a micro-capillary.
date: 2016-09
full_text_status: none
pres_type: lecture
pagerange: 1-6
event_title: 2016 6th Electronic System-Integration Technology Conference (ESTC)
event_type: conference
refereed: TRUE
citation:   Robbins, Hannah and Liu, Changqing and Hu, Sijung and Bui, Thanh Tung and Aoyagi, Masahiro  (2016) Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH).  In: 2016 6th Electronic System-Integration Technology Conference (ESTC).