<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "A Prospective Low-k Insulator for Via-Last through-Silicon-Vias (TSVs) in 3D Integration"^^ . "2016" . . . . . . . . . . . . . . . . . . . . . . . "Thanh Tung"^^ . "Bui"^^ . "Thanh Tung Bui"^^ . . "Masahiro"^^ . "Aoyagi"^^ . "Masahiro Aoyagi"^^ . . "Naoya"^^ . "Watanabe"^^ . "Naoya Watanabe"^^ . . "Katsuya"^^ . "Kikuchi"^^ . "Katsuya Kikuchi"^^ . . "Xiaojin"^^ . "Cheng"^^ . "Xiaojin Cheng"^^ . . "Fumiki"^^ . "Kato"^^ . "Fumiki Kato"^^ . . . . "2016 IEEE 66th Electronic Components and Technology Conference (ECTC)"^^ . . . . . "HTML Summary of #2326 \n\nA Prospective Low-k Insulator for Via-Last through-Silicon-Vias (TSVs) in 3D Integration\n\n" . "text/html" . . . "Electronics and Communications"@en . .