?url_ver=Z39.88-2004&rft_id=doi%3A10.1117%2F12.733533&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Le%2C+Vu+Ha&rft.aulast=Le&rft.aufirst=Vu+Ha&rft.date=August+2007&rft.issn=0277786X&rft.title=Image+blur+analysis+for+the+subpixel-level+measurement+of+in-plane+vibration+parameters+of+MEMS+resonators&rft.btitle=Applications+of+Digital+Image+Processing+XXX&rft.genre=proceeding