relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2364/ title: Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators creator: Le, Vu Ha creator: Gouiffes, Michele creator: Parrain, Fabien creator: Bosseboeuf, Alain creator: Zavidovique, Bertrand subject: Communications subject: Electronics and Communications subject: Electronics and Computer Engineering subject: Information Technology (IT) date: 2007-08 type: Conference or Workshop Item type: PeerReviewed identifier: Le, Vu Ha and Gouiffes, Michele and Parrain, Fabien and Bosseboeuf, Alain and Zavidovique, Bertrand (2007) Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators. In: SPIE Optical Engineering + Applications, 2007, San Diego, CA, USA. relation: http://doi.org/10.1117/12.733533 relation: doi:10.1117/12.733533