%0 Conference Paper
%A Le, Vu Ha
%A Gouiffes, Michele
%A Parrain, Fabien
%A Bosseboeuf, Alain
%A Zavidovique, Bertrand
%B SPIE Optical Engineering + Applications
%C San Diego, CA, USA
%D 2007
%F SisLab:2364
%P 66962D-66962D
%T Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2364/
%V 6696