<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators"^^ . "2007-08" . . "6696" . . . . . . . . . . . . . . . . . . . "Fabien"^^ . "Parrain"^^ . "Fabien Parrain"^^ . . "Bertrand"^^ . "Zavidovique"^^ . "Bertrand Zavidovique"^^ . . "Alain"^^ . "Bosseboeuf"^^ . "Alain Bosseboeuf"^^ . . "Vu Ha"^^ . "Le"^^ . "Vu Ha Le"^^ . . "Michele"^^ . "Gouiffes"^^ . "Michele Gouiffes"^^ . . . . "SPIE Optical Engineering + Applications"^^ . . . . . "San Diego, CA, USA"^^ . . . . . "HTML Summary of #2364 \n\nImage blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators\n\n" . "text/html" . . . "Communications"@en . . . "Electronics and Communications"@en . . . "Electronics and Computer Engineering"@en . . . "Information Technology (IT)"@en . .