TY  - CONF
ID  - SisLab2364
UR  - http://doi.org/10.1117/12.733533
A1  - Le, Vu Ha
A1  - Gouiffes, Michele
A1  - Parrain, Fabien
A1  - Bosseboeuf, Alain
A1  - Zavidovique, Bertrand
Y1  - 2007/08//
VL  - 6696
SN  - 0277786X
TI  - Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators
SP  - 66962D
M2  - San Diego, CA, USA
AV  - none
EP  - 66962D
T2  - SPIE Optical Engineering + Applications
ER  -