%A Vu Ha Le
%A Michele Gouiffes
%A Fabien Parrain
%A Alain Bosseboeuf
%A Bertrand Zavidovique
%T Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators
%P 66962D-66962D
%B Applications of Digital Image Processing XXX
%V 6696
%D 2007
%C San Diego, CA, USA
%R doi:10.1117/12.733533
%L SisLab2364