eprintid: 2364 rev_number: 15 eprint_status: archive userid: 281 dir: disk0/00/00/23/64 datestamp: 2017-11-23 07:08:20 lastmod: 2017-11-23 07:08:20 status_changed: 2017-11-23 07:08:20 type: conference_item succeeds: 1850 metadata_visibility: show creators_name: Le, Vu Ha creators_name: Gouiffes, Michele creators_name: Parrain, Fabien creators_name: Bosseboeuf, Alain creators_name: Zavidovique, Bertrand creators_id: halv@vnu.edu.vn creators_id: michele.gouiffes@limsi.fr creators_id: fabien.parrain@c2n.upsaclay.fr creators_id: alain.bosseboeuf@c2n.upsaclay.fr creators_id: zavido@ief.u-psud.fr title: Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators ispublished: pub subjects: Communications subjects: ECE subjects: ElectronicsandComputerEngineering subjects: IT divisions: fac_fet date: 2007-08 date_type: published official_url: http://doi.org/10.1117/12.733533 id_number: doi:10.1117/12.733533 full_text_status: none pres_type: paper volume: 6696 pagerange: 66962D-66962D event_title: SPIE Optical Engineering + Applications event_location: San Diego, CA, USA event_dates: 2007 event_type: conference refereed: TRUE issn: 0277786X book_title: Applications of Digital Image Processing XXX citation: Le, Vu Ha and Gouiffes, Michele and Parrain, Fabien and Bosseboeuf, Alain and Zavidovique, Bertrand (2007) Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators. In: SPIE Optical Engineering + Applications, 2007, San Diego, CA, USA.